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Magnetron Sputtering Target Materials

Time:2014-03-26 08:33:27  From:CNKI  Author:Wu Lijun

Abstract Target Materials have great market demands because magnetron sputtering is a popular technique in the growth of functional films,metal films in particular.The latest development of target materials,including their classification,their preparation,and their quality requirements,as well as the future prospects of target materials industry,was reviewed.

Keywords Sputtering,Target,Functional film

 

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