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The Kinds、Application、Manufacture and Developing Trend of Sputtering Target Materials

Time:2014-03-17 09:41:41  From:CNKI  Author:CHEN Jian-jun,YANG Qing-shan,H

Abstract:The demand for sputtering target materials are increased with the rapid development of the electronic and information industries in the world.The kinds、application、manufacture and develoing trend of sputtering target materials are presented in this paper.

Key words:sputtering;target materials;kinds;application;manufacture;developing trend

 

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