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Review of Ferromagnetic Targets for Magnetron Sputtering

Time:2014-03-13 14:52:06  From:CNKI  Author:Yang Changsheng,ChengHaifeng,T

Abstract Latest progress in ferromagnetic targets for magnetron sputtering was reviewed with discussion focused on the technical limitation of magnetic shielding of ferromagnetic targets.Various possible solutions available were tentatively analyzed to provide some information for design of a dedicated magnetron sputtering system.

Keywords Magnetic pinching of the plasma,Ferromagnetic target,Target Design,Magnetron sputtering

 

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