Abstract ：In this article，AZO target was prepared by cool pressure-sintering method. The experiment was designed with orthogonal technique. The mass fraction of alumina, pressure, sinter temperature and sintering time on the target relative density were investigated to determine the best preparation technology parameters. The study have shown that the optimal preparation parameters are: the mass fraction of alumina 4 %, the pressure 11 MPa, the sintering temperature 1300 ℃ ,sintering time 2 h, and under this conditions, the relative density of AZO target prepared is the best and as high as 98 %.
Key words: AZO target; Relative density; Cool pressure-sintering method; Zinc aluminum oxides
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