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Research of organic gas spraying technology

Time:2013-10-19 09:09:13  From:CNKI  Author:Li Guodong

  ABSTRACT
  
  At present, organic small molecular weight materials are widely used in many types of organic photoelectric devices (for example: OLEDs, Organic Solar Cells,Organic Thin Film Transistors and so on). These organic thin films are typically grown through vacuum thermal evaporation (VTE), depositing films with high degree of purity,good uniformity and reliable performance. However, the use of high vacuum process is very complex for the deposition of uniform films on large area substrate because of the high cost and the limit of throughput. Others organic thin film growth technologies (such as spin coating and ink-jet printing and so on) have certain applications in the growth of organic thin film, but they are difficult to keep the uniformity of the thin films.
  So the high production cost, low yield rate and hard to realize large area uniformly deposition are the main reasons of restricting the development of organic photoelectric devices.
  The traditional ways of organic thin film growth are summarized in this paper.Based on the study of organic vapor phase deposition (OVPD) and organic vapor jet printing (OVJP), direct organic vapor jet printing in atmosphere environment is studied with innovative and exploratory. In this paper, the OVJP is systematically researched with four main points as follows:
  
  1. Research of OVPD technology
  
  The conception of OVPD is studied and the transport regime in OVPD system is briefly described by modeling the transport process. A deposition model is set up and dynamical deposition of organic vapor employing Monte Carlo method is modeled. The impacts of different parameters on film deposition are studied at the situation of adding a mask in front of the substrate or not.
  
  2. Research of OVJP in atmosphere
  
  The principle of OVJP is described in detail, and the concept of OVJP in atmosphere is proposed. The printing system in atmosphere of OVJP is made and the impact of nozzle shape and other parameters on the printing process are studied with Fluent. The best nozzle model is achieved based on the simulation results, which could be a good guidance for the design of actual nozzle.
  
  3. Design and making of OVJP system to realize the growth of organic thin film in atmosphere
  
  The printing system is designed based on simulation results and the OVJP system in atmosphere is made. The deposition of Alq3 is done and the influence of different deposition conditions on the shape of film is studied, the film surface morphology is analyzed through electron microscope and SEM,The PL spectrum and infrared absorption spectrum are tested and the compare with normal spectrum is done.
  
  4. Preliminary study of making micro-nozzle for OVJP based on the silicon wet etching technology.
  
  Making controllable microchannel on silicon as the nozzle of OVJP based on silicon wet etching technology is proposed and designed. The effect of multi-layers structure as mask in the isotropic etching is studied as preliminary research.
  
  Keywords: Organic thin film, OVPD,OVJP, Atmosphere, Wet etching
  
  

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