Abstract: ITO targets were prepared by microwave sintering from single-phase ITO (indium tin oxide) powder in the pure oxygen atmosphere. Sintering temperature, holding time and pressing pressure as a function of the microwave sintering process parameters were researched systematically. The results indicate that the relative density of samples increases with the increasing of the temperature. The relativ e density of samples increases then decreases with the time increasing when sintered at 1 600 ℃. The relative density reached the maximum value (98.67%) when 1.5 hours holding.It is shown that high temperature and long holding time deteriorate densification of the ITO targets. Microstructure of ITO targets microwave sintered are homogeneous, the grain size is uniform distributing around 6~8 µm approximately.
The XRD analysis indicates that no SnO2 precipitation is observed under different sintering temperature, and ITO targets still are single- phase, without the second phase.
Key words: ITO targets; microwave sintering; relative density
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