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Properties of Zinc Aluminum Oxide Films and Its Ceramic Target Fabrication

Time:2014-03-17 09:30:59  From:CNKI  Author:Yang Weifang,Liang Zhanhong,Ho

Abstract Highly compact,low cost zinc aluminum oxide(ZAO) ceramic target was fabricated by a combination of sol-gel and conventional technique.Then,ZAO films were grown by middle frequency magnetron sputtering of the lab-made target.Its microstructures were characterized with X-ray diffraction(XRD) and scanning electron moicroscopy (SEM).The results showthat high quality ZAOfilms can be grownwith the lab-made targets.Satisfactory resultswere also obtained in the industrial magnetron sputtering thin film test.
Keywords ZAO,Ceramic target,Thin film,Magnetron sputtering,Resistivity,Transmittance


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