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Manufacture and application of sputtering target mterials

Time:2014-03-13 15:26:49  From:CNKI  Author:YANG Bang-chao, CUI Hong-ling

Abstract:Many kinds of sputtering target materials are necessary for manufacturing in IT. Process of making sputtering target materials and the main applied cases are briefly discussed.
Key words:sputtering; target material; film

 

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