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Target material choice and its character of laser-produced plasma source

Time:2014-03-11 10:27:14  From:CNKI  Author:Lin Jingquan, Chen Bo, Ni Qila

ABSTRACT Choice criteria on target material for soft X-ray projection lithography source were pro-posed in this paper. Spectral data of Li-like oxygen ion were given based on this criteria. The characteristics of new plasma target were given compared with conventional metal targets .
KEY WORDS laser-plasma, target material, debris


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