Research of Phase Structure of Multilayered Vacuum-Plasma Coatings of System Ti–C–Si
V.V. Budilov, S.R. Shehtman, N.А. Suchova
Coating Deposition
abstract:The phase structure and structure of Ti Si system multi-layer coatings was examined by way of X-ray structure analysis. In accordance with the technological operation a wide range of carbon content was observed in Ti Si system multi-layer coatings. At heat treatment of Ti Si system multi-layer coatings self-organizing interac- tion processes occur between coating layers that results in redistribution of chemical elements in a coating. To control the redistribution of chemical elements in a coating we considered the method of their heat treatment.
keywords:redistribution; accordance; Phase Structure; chemical elements; Coating Deposition
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